Toward Coarse and Fine Bimodal Structures for Improving the Plasma Resistance of Al2O3

In the quest to produce high-purity alumina, bottom-up engineering via architecting the interior of ceramic with bimodal structures of alumina powders in the absence of any additives has gained considerable attention owing to the simplicity offered. The present work investigated the influence of bimodal structures containing micron (~35 μm) and submicron (~600 nm) Al2O3 powders on the formation of dense Al2O3 ceramic. To this end, ball-milling was conducted to prepare the desired sizes of powders, followed by two-step sintering in a vacuum at 1450 °C and 1650 °C with 6 h and 4 h holding times, consecutively. The bimodal structures induced the formation of Al2O3 ceramic with nearly full densification (>99%; ρ 3.95 g/cm3). Both the coarse and fine-grained moieties synergistically balanced the densification kinetics whilst suppressing abnormal grain growth. The uniform and homogeneous grain size minimized the plasma porosity down to <6.0%, limiting the penetration of plasma during the etching process.