The analysis of TGV properties using laser induced deep etching suggests a relationship with glass characteristics.
In this paper, the process of preparing through glass via (TGV) by laser induced deep etching(LIDE) was studied, the TGV prepared by laser induced deep etching was characterized and analyzed, the relationship between glass characteristics and TGV properties was explored, the influence mechanism of wet etching process on TGV morphology was analyzed ， and the characterization standard of TGV was established.
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Xing et al. (2025) studied this question.
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