In Situ Integration of Stable Glass Microdevices on Optical Fiber Tips via Ultrafast Laser 3D Nanolithography

Integrating microdevices on optical fiber tips possesses significant potential for sensing, imaging, and related fields. However, their fabrication has long been constrained by incompatibility and the chemical and thermal instability of polymeric materials. This study proposes a novel fabrication strategy for stable glass microdevices in situ integrated on optical fiber based on femtosecond laser 3D nanolithography. Through optimization of siloxane materials and robust structural design, unstable organic structures can be transformed into stable glass structures. Synergizing interfacial tension with optimized contact surfaces ensures uniform shrinkage of the functional structure during annealing. The devices exhibit appreciable thermal stability and organic solvent resistance, withstanding prolonged acetone immersion. Experimental results demonstrate the high performance of the fabricated glass microdevices in optical microsystems, along with sustained stability in harsh environments. This study offers a promising approach for fabricating fiber‐integrated inorganic functional structures, paving the way for significant advancements in fiber‐integrated functional microdevices.