Novel 3D interdigitated electrode hydrogen sensor shows 26.7% response at 20,000 ppm H2, suggesting enhanced leak detection.
Capacitive sensors based on Palladium Nanoparticles (Pd NPs) show high promise for hydrogen (H 2 ) leak detection due to their high resistance to interference at room temperature. In this study, a novel three-dimensional (3D) interdigitated electrode (IDE) capacitive H 2 sensor was proposed. Using micro-electromechanical systems (MEMS) fabrication techniques, IDE structures of various dimensions were prepared and dropped with Pd NPs as sensing material. Through dynamic response testing and analysis, the results demonstrate that the 3D IDE H 2 sensor achieves its maximum response value of 26.7% at H 2 concentration of 20, 000 ppm when the IDE’s length is 1000 μm and the spacing is 80 μm.
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Qiu et al. (2025) studied this question.
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