Simulation and experimental validation of properties of plasma species generated using an Electron Cyclotron Resonance (ECR) plasma system and their interaction with Kapton

It is interesting to simulate an ECR plasma reactor to optimize the plasma conditions with a predetermined set of properties and validate the same experimentally, which expands the utility of the source for different applications, such as biomedical applications, surface modifications for catalysis, generations of nano-crystalline surfaces, space applications, and similar other material processing. Hence, the focus of the present study is to simulate properties of plasma species generated in an ECR plasma reactor using Finite Element Analysis (FEA) to investigate the spatial distribution of crucial plasma parameters as a function of gas pressure. The operating parameters of the ECR plasma system were varied using the Charged Particle Tracing (CPT) module to estimate the velocity and energy distribution functions of ions/plasma species. The required properties of the ions/plasma species have been optimized based on a simulation study to obtain velocity and energy distributions similar to those needed for material processing in general, as well as to meet some of the LEO conditions responsible for the surface modification of space polymers. The parameters, such as magnetic field, electron density, electron temperature, Debye length, and plasma potential, obtained using a simulation study, have been compared with experimental data obtained using a Gauss meter and a Langmuir probe. The simulated and experimental plasma parameters are found to be in good agreement with each other. Furthermore, the optimized plasma parameters have been used to examine the feasibility of the interaction between argon plasma and the surface of a test material, such as Kapton (polyimide), a technologically important polymer used in space applications. This study can be further utilized to customize plasma parameters and tune the surface properties of materials, including polymers, for various applications.