Recent advancements demonstrate scalable fabrication of single-photon emitters in silicon nitride, indicating potential for quantum photon technologies.
We present recent developments on single-photon emitters in silicon nitride, analyzing defect structures through material characterization and computational modeling. Additionally, we demonstrate their fabrication using a foundry-compatible deposition technique, enabling scalability for quantum photonic applications.
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Senichev et al. (2025) studied this question.
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