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This analysis reveals correlations between plume parameters in YBCO deposition, highlighting improved reproducibility.
This study used a depth camera to monitor the plume during YBa 2 Cu 3 O y (YBCO) thin film deposition by pulsed laser deposition (PLD). Plume characteristics (height, width, and color) were changed by varying oxygen pressure and laser energy. Correlations between parameters were analyzed using principal component analysis (PCA), suggesting a correlation between plume color and composition. These results suggest that monitoring the plume is an effective way to improve the reproducibility of YBCO thin films.
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Matsuda et al. (2025) studied this question.
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