Leveling Method of Working Platform Based on PZT Electromechanical Coupling Effect.

Lead zirconate titanate (PZT) piezoelectric ceramics are widely used functional materials due to their strong and stable piezoelectric properties. A leveling method based on lead zirconate titanate piezoelectric ceramics is proposed for the high level of accuracy required in microelectromechanical fields such as aerospace, industrial robotics, biomedical, and photolithography. A leveling mechanism consisting of core components such as piezoelectric ceramic actuators and sensors is designed. The closed-loop leveling of the working platform is performed using the electromechanical coupling effect of the PZT piezoelectric material. Combined with the theory of the dielectric inverse piezoelectric effect in electric fields, a simulation is used to analyze the four force and deformation cases generated by the drive legs when the load is attached at different positions of the working platform, and the leveling is realized by applying the drive voltage to generate micro-motion displacement. Simulation and calculation results show that the leveling method can reduce the tilt angle of the working platform by 60% when the driving voltage is in the range of 10~150 V. The feasibility of the leveling method and the uniformity of the theoretical calculation and simulation are verified.