Large area x-ray rocking curve mapping technique utilizing a wide beam of BL09 at SAGA Light Source

A large-area x-ray rocking curve (LAXRC) mapping technique was developed by leveraging the wide beam capability of BL09 at the SAGA Light Source synchrotron facility. An x-ray imaging detector with a 50 × 50 mm 2 -receiving area and 50 μ m/pixel-resolution was employed. The methodology, from data collection to the analysis of full width at half maximum (FWHM) and peak-position distributions, was presented, and then the LAXRC mapping measurements of 2 inch ScAlMgO 4 and 6 inch SiC wafers were demonstrated. The FWHM value exhibited sensitivity to the residual lattice strain, and its distribution was ascertained to correlate with the dislocation distribution structure observed using x-ray topography. By contrast, the peak-position distribution, which visualizes lattice warpage, was insensitive to minor strain fields from dislocations but responded to the significant strain fields of macro defects. The results indicate that the LAXRC mapping technique is an efficient and powerful tool for assessing lattice strain and lattice warpage structures in the entire large wafers.