This research demonstrates the fabrication of an electrostatically actuated MEMS switch, highlighting its design parameters and potential applications.
Surface micromachining technique was applied to produce electrostatically actuated microelectromechanical (MEMS) switch. Vibrating cantilever beam of varying length was fabricated using a copper sacrificial layer and nickel electroplating technique. The length and thickness of a cantilever beam as well as a gap space determines actuation voltage and should be optimized to ensure the best performance of a switch. The fabricated microelectromechanical switch can be used as autonomous electrostatically driven microrelay or can be integrated for use in semiconductor chips or hybrid devices.
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