An E-Band High-Precision Active Phase Shifter Based on Inductive Compensation and Series Peaking Enhancement Techniques

This paper presents the design and implementation of a 6-bit high-precision active vector-sum phase shifter (PS) operating in the E-band, fabricated using a 40 nm CMOS process. To generate high-quality in-phase and quadrature (I/Q) signals, a folded transformer-based quadrature generator circuit (QGC) employing inductive compensation is developed. Additionally, the series peaking enhancement technique is applied to improve overall gain and effectively extend the bandwidth. Measurement results demonstrate that the phase shifter achieves a 3 dB bandwidth from 72.3 GHz to 82.3 GHz. Within this range, the measured RMS phase error is merely 1.78–2.55 degrees without calibration, and the RMS gain error is 0.6–0.75 dB. The core area of the proposed phase shifter is 940 μm × 280 μm, and it consumes 57.2 mW of power with a 1.1 V supply.