Nine-Probe Third-Order Matrix System for Precise Flatness Error Detection

Large-scale, high-density flatness measurement is critical for manufacturing reference surfaces in ultra-precision machine tools. Traditional methods exhibit degradation in both accuracy and efficiency as measurement points and area size increase. In order to overcome these limitations to meet the requirements for integrated in-process measurement and machining of structural components in ultra-precision machine tools, this paper proposes a novel nine-probe third-order matrix system that integrates the Fine Sequential Three-Point (FSTRP) method with automated scanning path planning. The system utilizes a multi-probe error separation algorithm based on the FSTRP principle, combined with real-time adaptive sampling, to decouple machine tool motion errors from intrinsic workpiece flatness deviations. This system breaks through traditional multi-probe 1D straightness measurement limitations, enabling direct 2D flatness measurement (with X/Y error decoupling), higher sampling density, and a repeatability standard deviation of 0.32 μm for large precision machine tool components. This high-efficiency, high-precision solution is particularly suitable for automated flatness inspection of large-scale components, providing a reliable metrology solution for integrated measurement-machining of flatness on precision machine tool critical components.