An integrated interferometer detects millimetre displacement with a sensitivity of 0.7%/nm, utilizing waveguide holograms.
We present a multi-wavelength integrated interferometer for nanoscale displacement sensing of a mirror positioned several millimetres above the chip. The chip-to-mirror coupling is realized using waveguide holograms. The sensitivity measures 0.7%/nm at 633 nm.
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Vocht et al. (2025) studied this question.
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