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This is a Experimental Study study.

September 18, 2025

BaTiO3/TiO2 Hybrid Metasurface for Free-space Electro‑optic Modulators

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The metasurface enables significant electro-optic tuning at 1579.8 nm, suggesting CMOS compatibility.

The device achieves a tuning rate of ~0.43 nm/(V/μm), enhancing its performance.
Utilizing a BaTiO3/TiO2 heterostructure, the metasurface exhibits high-Q guided mode resonance.
This free-space active metasurface demonstrates potential for applications in compact optical devices.
CMOS compatibility of the technology may enable integration with existing semiconductor manufacturing processes.

Yousef et al. (2025) studied this question.

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