Experimental assessment reveals 7.2 µg bias instability in a high-bandwidth accelerometer, suggesting enhanced sensing reliability.
We demonstrate a bulk-micromachined accelerometer with 100 kHz bandwidth featuring an intrinsically differential Mach-Zehnder strain-sensing interferometer. The differential, broadband readout provides reduced susceptibility to temperature, package stress, and laser frequency fluctuations resulting in a bias instability of 7.2 µg at 343.7 seconds.
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Ge et al. (2025) studied this question.
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