Observation of improved yield in fluxonium superconducting qubits, suggesting enhanced process control.
Fluxonium superconducting qubits have been fabricated on sapphire substrates using an e-beam lithography-based Dolan Bridge technique. To enhance process control and improve yield, the quantum circuit fabrication is monitored through a non-destructive, in-line X-ray metrology method.
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Lu et al. (2025) studied this question.
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