The preliminary exploration of Ion beam assisted deposition method for fabricating the flexible heat flux sensor

Atomic layer thermopile (ALTP) heat flux sensors have been used to study unsteady heat transfer phenomena by measuring the rapidly changing heat flux. The development of flexible ALTP heat flux sensors has become a trend to meet the requirements of irregular surface measurement. The key to this problem is to design and prepare a textured template layer with an inclined c -axis for replacing the typical singlecrystal substrate. In this work, a feasible route derived from the Ion Beam Assisted Deposition (IBAD) method has been explored. The MgO film based on the Hastelloy C-276 tapes can form a c -axis tilted crystalline structure on the flexible amorphous substrate by modifying the MgO evaporation source and ion beam incident angles. The following epitaxially grown sensitive film represents the typical heat flux response characteristics.