Photovoltaic PECVD equipment retrofitting for scalable manufacturing of DLC-coated graphite components: Mechanistic analysis and engineering innovation

This study evaluates the feasibility of retrofitting photovoltaic plasma-enhanced chemical vapor deposition (PECVD) equipment for scalable manufacturing of diamond-like carbon (DLC) coated graphite components, such as automotive bearings, through theoretical modelling and computer simulations. The mechanistic analysis focuses on the plasma activation process of hydrocarbon precursors, deriving the formation mechanism of sp 3 /sp 2 hybridized structures and predicting key coating performance metrics, including Raman spectrum I_D/I_G ratios of 0.5-1.0, hardness of 2500–3500 HV, and friction coefficients of 0.05–0.15. Engineering simulations employ COMSOL Multiphysics to model plasma distribution and airflow optimization, assessing batch capacity of 50–200 pieces per cycle and thickness variation of <5%. Calculations quantify activation energy E a ≈75 kJ/mol and interfacial stress <2 GPa. The results demonstrate the viability of the retrofit system, innovatively enabling cross-domain equipment transformation and utilization to promote sustainable manufacturing. However, challenges include ion bombardment-induced defects and geometric complexity. This research provides theoretical guidance for the industrialization of advanced materials.