High Transmission Efficiency Hybrid Metal-Dielectric Metasurfaces for Mid-Infrared Spectroscopy

Mid-infrared (MIR) spectroscopy enables non-invasive identification of chemical species by probing absorption spectra associated with molecular vibrational modes, where spectral filters play a central role. Conventional plasmonic metasurfaces have been explored for MIR filtering in reflection and transmission modes but typically suffer from broad spectral profiles and low efficiencies. All-dielectric metasurfaces, although characterized by low intrinsic losses, are largely limited to reflection mode operation. To overcome these limitations, we propose a hybrid metal-dielectric metasurface that combines the advantages of both platforms while simplifying fabrication compared to conventional Fabry–Pérot filters. The proposed filter consists of silicon (Si) crosses atop gold (Au) square patches and demonstrates a transmission efficiency of 87% at the operating wavelength of 4.28 µm, with a full width half maximum (FWHM) as narrow as 43 nm and a quality factor of approximately 99.5 at λ = 4.28 μm. Numerical simulations attribute this performance to hybridization of Mie lattice resonances in both the gold patches and silicon crosses. By providing narrowband, high-transmission filtering in the MIR, the hybrid metasurface offers a compact and versatile platform for selective gas detection and imaging. This work establishes hybrid metal–dielectric metasurfaces as a promising direction for next-generation MIR spectroscopy.