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Demonstrative findings highlight tuning rates of 120 MHz/V and low propagation loss in piezo-optomechanically adjustable resonators.
We present tunable photonic resonators using piezo-strained alumina-based waveguides fabricated in a 200 mm volume-CMOS foundry. At 320 nm, we demonstrate linewidths of 2.5 GHz (propagation loss of 1.4 dB/cm) and tuning rates of ∼ 120 MHz/V.
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Castillo et al. (2025) studied this question.
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