Gas analysis reveals a reliable correlation between residual gas analyzer intensity and gas concentration, suggesting improved Tier 4 emissions monitoring.
In this study, we propose a simple and effective method for gas analysis by establishing a correlation between residual gas analyzer (RGA) intensity and gas concentration. To achieve this, we focused on CF4 and NF3, two high-global warming potential (GWP) gases commonly used in industrial applications. The experiment was conducted in four key steps: identifying gas species using optical emission spectroscopy (OES), calibrating RGA with a quadrupole mass spectrometer (QMS), constructing a five-point calibration graph to correlate RGA and Fourier-transform infrared spectroscopy (FT-IR) data, and estimating the concentration of unknown samples using the calibration graph. The results under plasma-on conditions demonstrated correlation and accuracy, confirming the reliability of our approach. In other words, the method effectively captured the relationship between RGA intensity and gas concentration, providing valuable insights into concentration trends. Thus, our approach serves as a useful tool for estimating gas concentrations and understanding the correlation between RGA intensity and gas composition.
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Jeong et al. (2025) studied this question.