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Post-fabrication tuning of circular Bragg grating resonators via atomic layer deposition

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Demonstration of post-fabrication tuning using atomic layer deposition in semiconductor systems, indicating enhanced resonance matching.

A tuning of the resonator mode of up to 11.3 nm was achieved using atomic layer deposition.
The study utilized a dielectric layer (Al2O3) to shift the optical resonance in the devices.
Fabrication often causes detuning of resonator frequency from the intended emitter frequency.
The technique is applicable for various circular Bragg grating resonators across material systems.

Kaupp et al. (2025) studied this question.

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