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October 2, 2025PhotonicsOpen Access

Controlled Growth of Multifilament Structures with Deep Subwavelength Features in SiC via Ultrafast Laser Processing

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Authors

XSXiaoyu SunHZHaojie ZhengQJQiannan Jia

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Overview

This study demonstrates ultrafast laser processing creates multifilament structures in silicon carbide, indicating enhanced nanostructuring capabilities.

Key Points

  • The process achieved multifilament structures with a length of approximately 90 μm and a linewidth of 28 nm, showcasing effective nanostructuring.
  • Using elliptical Gaussian beams led to the stabilization of multifilaments, resulting in high-parallelism and straightness in the structures formed.
  • The induced nanostructures displayed an impressive aspect ratio exceeding 3200:1, highlighting advancements in high-aspect-ratio fabrication techniques.
  • Raman tests revealed the presence of amorphous SiC and carbon, while photoluminescence tests indicated induced silicon vacancy color centers.

Cite This Study

Sun et al. (2025) studied this question.

synapsesocial.com/papers/68de84bf5b556a9128e1bd23https://doi.org/10.3390/photonics12100973
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