Discharge structure hierarchy of highly electronegative plasma at low pressure and quasi-cold ion approximation

Rongxin Tang; Shu-Xia Zhao; Yü Tian

doi:10.48550/arxiv.2509.04728

September 5, 2025Open Access

Discharge structure hierarchy of highly electronegative plasma at low pressure and quasi-cold ion approximation

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Key Points

The discharge structure of plasma demonstrates unique characteristics at low pressure, influencing ion dynamics.
Simulation results show that quasi cold ion approximation effectively captures plasma behavior at room temperature.
Inductively coupled plasma consisting of argon and sulfur hexafluoride presents distinct discharge patterns, informing further research.
Fluid simulations provide crucial insights into the electrodynamics of low-pressure plasma systems.

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Implication

Fluid simulation reveals discharge structure of inductively coupled plasma under low pressure, indicating insights on ion behavior.

Abstract

In this paper, the discharge structure of an Ar and SF inductively coupled plasma at the low pressure is investigated by mean of a fluid simulation at the quasi cold ion approximation with the room temperature magnitude.

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Tang et al. (2025) studied this question.

synapsesocial.com/papers/68e02f46f0e39f13e7fa2bb2 https://doi.org/10.48550/arxiv.2509.04728

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Discharge structure hierarchy of highly electronegative plasma at low pressure and quasi-cold ion approximation

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Discharge structure hierarchy of highly electronegative plasma at low pressure and quasi-cold ion approximation

Key Points

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