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October 3, 2025Open Access

Discharge structure hierarchy of highly electronegative plasma at low pressure and quasi-cold ion approximation

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Authors

RTRongxin TangSZShu-Xia ZhaoYTYü Tian

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Overview

Fluid simulation reveals discharge structure of inductively coupled plasma under low pressure, indicating insights on ion behavior.

Key Points

  • The discharge structure of plasma demonstrates unique characteristics at low pressure, influencing ion dynamics.
  • Simulation results show that quasi cold ion approximation effectively captures plasma behavior at room temperature.
  • Inductively coupled plasma consisting of argon and sulfur hexafluoride presents distinct discharge patterns, informing further research.
  • Fluid simulations provide crucial insights into the electrodynamics of low-pressure plasma systems.

Cite This Study

Tang et al. (2025) studied this question.

synapsesocial.com/papers/68e02f46f0e39f13e7fa2bb2https://doi.org/10.48550/arxiv.2509.04728
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