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November 1, 2025AIP AdvancesOpen Access

Discharge structure theory of highly electronegative plasma and its hierarchy and interdisciplinary meanings

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Authors

SZShu Xia ZhaoYTYu Tian

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Overview

Systematic analysis reveals discharge structure behaviors in inductively coupled plasma at varying mTorr pressures, indicating new interdisciplinary insights.

Key Points

  • The discharge structure was identified as the double layer in the inductively coupled Ar/SF6 plasma system.
  • Observations included variations at 10 to 90 mTorr in core plasma morphology and discharge profile.
  • Fluid model simulation using the finite element method explored transport and chemistry-dominated regimes.
  • The findings highlight potential interdisciplinary connections with astrophysics and atomic physics.

Cite This Study

Zhao et al. (2025) studied this question.

synapsesocial.com/papers/69254f7dc0ce034ddc359054https://doi.org/10.1063/5.0296152
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