Chemical Analysis and Immersion Testing of a Hydrocarbon Film (Benzene) After Deposition on Glass Slides Using Plasma-Enhanced Chemical Vapor Deposition (PECVD)

Thin films deposited on glass surfaces can be produced by various methods, including physical methods (thermal evaporation in vacuum, sputtering, etc.) and chemical methods (chemical deposition, chemical vapor deposition, thermal chemical analysis, etc.). In this paper, thin films were deposited on glass slides using the plasma-enhanced chemical vapor deposition (PECVD) technique at pressures (10,30 and 50 mTorr) for varying durations of (5,10 and 15 minutes). In addition, the results indicates that increasing the deposition time significantly influenced the film thickness while the adhesion does not directly depend on time.