A numerical analysis of the short open load calibration robustness for capacitance measurements in Scanning Microwave Microscopy

Numerous experimental parameters affect the accuracy of impedance measurements in scanning microwave microscopy (SMM). Investigating their effects on the measured values is particularly challenging. Here, we present the development of a fully-numerical finite element method-based simulation of the actual SMM measurements. We demonstrate the application of a self-calibration procedure for the simulated SMM measurements with a maximal deviation of ±0.8% relative to reference capacitances determined via an electrostatic finite element model. Furthermore, we demonstrate the possibility of assessing water meniscus-induced effects on the simulated SMM measurements. Typically, water meniscus impacts the calibration by a 0.4% relative deviation, in accordance with previously reported empiric data. Our findings are expected to promote access to a deeper understanding of nanoscale capacitance measurements in SMM.