Dynamic Phase Measurement based on Two-step Phase-shifting Interferometry with Geometric Phase Grating

This paper proposes a novel dynamic 2-step phase-shifting interferometry method with a geometric phase grating and direct aberration-free object phase recovery algorithm. By exploring the amplitude-phase modulation property of the geometric phase grating, two-step phase-shifting interferograms with π / 2 phase shift can be obtained in a single shot through two kinds of spatial-multiplexing arrangements. Then the restriction on the background uniformity of the 2-step phase-shifting algorithms and the system aberration can be avoided simultaneously, based on the presented direct and fast object phase demodulation strategy with an object-free state recorded in advance, so an accurate object measurement result can be guaranteed. Accordingly, a detailed analysis of the theoretical model of error sources is conducted by taking the depolarization error of geometric phase grating and phase measurement model error into consideration, with a Least Squares Iteration optimization strategy established to further improve the measurement accuracy. Experiments on various types of phase objects, such as a photo-etched quartz substrate, the spatial light modulator, and a silicon chip, validate the effectiveness and accuracy of our method when compared with the reference phase obtained from 4-step temporal phase-shifting method. The dynamic phase measurement capability is demonstrated by exhibiting the evaporation process of alcohol droplet.