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September 18, 2024NatureOpen Access

Advanced CMOS manufacturing of superconducting qubits on 300 mm wafers

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JDJacques Van DammeSMS. MassarRAR. Acharya

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Damme et al. (2024) studied this question.

synapsesocial.com/papers/68e580d4b6db64358751e891https://doi.org/10.1038/s41586-024-07941-9
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