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May 13, 2024

Enabling 300 mm Wafer-Scale Fabrication of Superconducting Quantum Devices

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Authors

EBEkta BhatiaHFHunter FrostNPNicholas Pieniazek

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Bhatia et al. (2024) studied this question.

synapsesocial.com/papers/68e6a61fb6db6435876294aahttps://doi.org/10.1109/asmc61125.2024.10545509
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