Internal quantum efficiency improvement of AlInGaN-based red LED by using double V-pits layers as strain relief layer

Micro/mini light emitting diodes (LEDs) based on AlInGaN material system have vast potential in display applications. Nevertheless, the low internal quantum efficiency (IQE) of InGaN-based red LED limits its development and application. In the epitaxial structure of our designed red LED, double V-pits layers were used as strain relief layers to reduce compressive strain and improve the IQE of the active layer. First, InGaN/GaN superlattices (SLs) were grown below the active layer to form low-density large V-pits layer. Subsequently, multi-period green and red composite quantum wells were adopted as the active layer. A high-density small V-pits layer was introduced into the active region to release the compressive strain by adjusting the growth parameters of green multiple quantum wells (MQWs). The V-shaped pits divide the continuous large-area of active layer into mutually isolated small pieces, which prevents the transmission of strain and converts the long-range strain into separated local strain. The peak IQEs of LED A2 with single V-pits layer and LED B4 with double V-pits layers were measured to be 10.5% at 613 nm and 21.5% at 612.1 nm, respectively. The IQE is greatly improved by 204.7%. The research results indicate that the double V-pits layers structure can alleviate the compressive strain of InGaN QWs more effectively, reduce the influence of piezoelectric polarization field, and improve the IQE.