Recent progress of astronomical piezoelectric deformable mirror technologies at IOE, CAS

Since the early 1980s, the Institute of Optics & Electronics (IOE) at Chinese Academy of Sciences (CAS) has accumulated over 40 years of expertise in the research and development of piezoelectric deformable mirror (DM) technologies. This institution has successfully implemented several piezoelectric DMs in diverse application systems. The following paper will outline the historical background of piezoelectric DM technologies at IOE, highlight some recent achievements, and elaborate on the key features, performances, and testing results of these DMs. Specifically, it will cover:1). A high-order DM equipped with 913 actuators; 2).The 2nd generation piezoelectric deformable secondary mirror (PDSM) featuring 241 actuators; 3).A high-density DM boasting over 1000 actuators. Moreover, the paper will discuss the advancements made in the development of higher-order DMs and PDSMs at IOE, CAS.