Biaxial Piezoelectrically Driven MEMS Mirror with Large Design Flexibility

In this work, a biaxial, piezoelectrically driven resonant MEMS mirror with large design flexibility is presented. After FEM-based design optimization to reduce material stress and thereby maximize the achievable total optical scanning angles, fabricated MEMS mirrors were electrically, mechanically, and optically characterized. While the achievable optical scanning angles were determined using a home-built optical setup, a laser Doppler vibrometer was used to characterize the resonance frequencies of the rotational modes and their respective quality factors. The encapsulation of the mirror by a glass window ensures its operation in vacuum, which increases the Q-factor up to 15,000.