Simulation Analysis and Experiment of Piezoelectric Pump with Tapered Cross-Section Vibrator

In order to meet the requirements of microfluidic transport in the fields of medical, health, and microelectromechanical integration, a valve-less piezoelectric pump with a tapered cross-sectional vibrator was designed according to the bionic principles of fish swimming. Through theoretical analysis, the pattern of fluid flow in the pump chamber caused by the vibration of the piezoelectric vibrator was derived. The flow field of the piezoelectric pump was analyzed through simulation based on multiple physical fields coupling using the software of COMSOL Multiphysics (version 6.1). The velocity field distribution and its change law were obtained, and the fluid disturbance and instantaneous motion suppression phenomena were acquired as well. Based on the analysis of flow field streamline, the rule of generating vortexes was found. Thus, the driving mechanism of the vibrator with the tapered cross-section, which was consistent with the swimming principle of a fish tail, was verified. A prototype pump was made, and the pump performance was tested. The experimental data showed that the tested flow rate changed in the same trend as the simulated flow rate. When the driving voltage was 150 V and the driving frequency was 588 Hz, the pump achieved a maximum output flow rate of 367.7 mL/min. These results indicated that the piezoelectric pump with the tapered cross-sectional vibrator has great potential of fluid transportation.