Resonant MEMS Accelerometer with Low Cross-Axis Sensitivity—Optimized Based on BP and NSGA-II Algorithms

This article proposes a low cross-axis sensitivity resonant MEMS(Micro-Electro-Mechanical Systems) accelerometer that is optimized based on the BP and NSGA-II algorithms. When resonant accelerometers are used in seismic monitoring, automotive safety systems, and navigation applications, high immunity and low cross-axis sensitivity are required. To improve the high immunity of the accelerometer, a coupling structure is introduced. This structure effectively separates the symmetric and antisymmetric mode frequencies of the DETF resonator and prevents mode coupling. To obtain higher detection accuracy and low cross-axis sensitivity, a decoupling structure is introduced. To find the optimal dimensional parameters of the decoupled structure, the BP and NSGA-II algorithms are used to optimize the dimensional parameters of the decoupled structure. The optimized decoupled structure has an axial stiffness of 6032.21 N/m and a transverse stiffness of 6.29 N/m. The finite element analysis results show that the sensitivity of the accelerometer is 59.1 Hz/g (