Heterogeneous integration of diamond quantum systems with silicon microelectronics

The NV centre in diamond has a long history in advancing quantum photonics technologies. Large-scale applications requires compatibility with integrated photonics for routing, with microelectronics integration equivalently important to realise control. Research to date has concentrated on microwires on diamond or in-house metallisation. In this work, we demonstrate integration of NV in nanodiamonds with silicon microelectronics. A key merit here is exploiting multi-layer metallisation for vector control and routing driving signals. We employ a 0.13um CMOS technology with seven metallic layers: the top layer for static magnetic fields with microwave control in the layer below, across 50μm spaced unit cells. Alignment markers enable lithographic positioning of nanodiamonds with associated NVs. We coherently control a positioned NV using the silicon structure and observe fifty times less power is required compared to an external antenna. The prototype paves the way for integrating solid-state quantum systems with sophisticated microelectronics, leveraging proximal silicon logic.