Foundry-Enabled Patterning of Diamond Quantum Microchiplets for Scalable Quantum Photonics

Quantum technologies promise secure communication and advanced information processing, but scaling these systems remains a challenge. Diamond is a promising platform because it hosts defects that emit single photons and store quantum information with high stability. However, the conventional fabrication of diamond optical structures is slow and difficult to scale. Here, we present a manufacturing approach that moves diamond quantum photonics closer to industrial production. Instead of patterning each device directly on diamond, we create high-precision silicon masks in commercial foundries and transfer them onto diamond by using microtransfer printing. This enables large arrays of nanoscale optical structures while improving uniformity, yield, and throughput. Using this method, we demonstrate hundreds of diamond quantum microchiplets with enhanced optical performance and controlled coupling to quantum emitters. The chiplet approach also allows faulty devices to be replaced and supports integration with existing photonic and electronic systems, offering a scalable path toward practical quantum technologies.