⌘+K

Pulse Explore Communities Researchers Journals

Browser extensionInstagram

Home Communities Explore

August 2, 2024Korean Journal of Metals and MaterialsOpen Access

Optimization of Ion Beam-Assisted Deposition Process for Y2O3 Film to Enhance Plasma Resistance

Choluk Oh Ojun Kwon Younghun Bae Hye-Jin Shin Young Min Kwon Byungjin Cho

View Full Paper

Ask AI

Bookmark

Share

Ask about this paper

Answers are grounded in this paper and cite their sources.

Ask your own question…

Abstract

This retracted the article "Optimization of Ion Beam-Assisted Deposition Process for Y2O3 Film to Enhance Plasma Resistance" on page 340.

Discussion

No takes yet. Share an insight, caveat, or question.

Cite This Study

Oh et al. (2024) studied this question.

synapsesocial.com/papers/68e5daeeb6db643587570eb6 https://doi.org/10.3365/kjmm.2024.62.8.672

View Full Paper

Ask AI

Bookmark

Share

Keep reading

Synapse has enriched 10 related papers. Consider them for comparative context:

1Preparation and Properties of Plasma Etching-Resistant Y2O3 Films2025 · 4 citations
2Study on the Microstructure, Corrosion Resistance and Dielectric Properties of Atmospheric Plasma-Sprayed Y2O3 Ceramic Coatings2024 · 15 citations
3Deposition of YSZ Thin Films by Atmospheric Plasma-Assisted Pulsed Laser AblationOriginal Research · 2012 · 4 citations
4Modification of YBa2Cu3Oy Thin Films by Exposure to Argon Plasma and Ozone: A Structural StudyOriginal Research · 2005
5The Etching Behaviour and Fluorine-Based-Plasma Resistance of YOF Coatings Deposited by Atmospheric Plasma Spraying2024 · 10 citations
6Effect of Sputtering Power on Structure and Plasma Resistance of Yttrium Oxide Coatings for Semiconductor EtchingOriginal Research · 2026
7Plasma resistance of sintered and ion-plated yttrium oxyfluorides with various Y, O, and F composition ratios for use in plasma process chamberOriginal Research · 2020 · 11 citations
8Microstructure and plasma corrosion behavior of yttria coatings prepared by the aerosol deposition methodOriginal Research · 2020 · 25 citations
9High-temperature Reliability of Gold Wire Bonding According to Aluminum Pad Thickness and Palladium ContentKorean Journal of Metals and Materials · 2025
10Hierarchical NiFe-LDH on Conductive Ni₃Se₂ Scaffolds for Efficient Oxygen Evolution ReactionKorean Journal of Metals and Materials · 2025

KMore from Korean Journal of Metals and Materials