Design, Manufacture and Control of a Multi-layer Piezoelectric Actuator

very small movements and high resolution for motion within several micrometer ranges. However, a significant challenge from the strong, nonlinear hysteresis arises affects the piezoelectric materials joining input voltage to output movement, which deteriorates the accuracy of the actuator and causes instability in a closed-loop system. To obtain high precision, accuracy and reduced nonlinear effects, piezoelectric actuators must be controlled with hysteresis compensation. Therefore, this research developed a piezoelectric-based microactuator system with a control scheme based on PID (proportional-integral-derivative) combined with the inverse hysteresis model implemented to compensate for the actuator's hysteresis. Furthermore, a Modified Prandtl-Ishlinskii (MPI) model was used to capture the hysteresis