Investigation on structural and morphological properties of molybdenum trioxide (MoO₃) thin films

The present study reports on the effect of substrate temperature on structural, morphological and optical properties of MoO 3 thin films. MoO 3 thin films were deposited on pre-heated glass substrate using spray pyrolysis technique. The substrate temperature was varied from 300 °C to 400°C with a step interval of 50 °C. Structural studies were studied using X-ray diffraction technique. It is observed that all the diffraction peaks exactly match with JCPDS card No. 05-0508. The as –deposited MoO 3 thin films exhibits orthorhombic crystal structure. It is found that the crystalline nature increases with the increases of substrate temperature. FESEM micrographs show that the grains are distributed uniformly over the surface without any void. An optical property reveals that the transmission of MoO 3 thin film in the visible region increases with increases of deposition temperature.