Fabrication of Flexible Organic Field Effect Transistor Used Patterned Electro-Spray Deposition

The electrospray deposition (ESD) method is wet process used solution spray formed by electric field between the needle of solution contained syringe and conductive substrate or insulated electrode. In this study, we fabricated thin films based on 6,13-bis(triisopropyl-silylethynyl) pentacene (TIPS-pentacene) formed by a new direct pattening ESD method. This method is an electric field applied between the nozzle and patterned electrodes on the substrate. It enables to form patterned films on such as plastic films. Moreover, this ESD method allows controlling patterned film width by using voltage on counter patterned electrode. These results demonstrate that the patterned TIPS-pentacene film width by controlling voltage. We fabricated flexible OFET using this method and measured static electrical characteristics.