Simultaneous Generation of Quantum Frequency Combs across Distinct Modal Families in a Single Si₃ N₄ Whispering Gallery Mode Resonator

Quantum frequency combs (QFCs) are versatile resources for multi-mode entanglement, such as cluster states, crucial for quantum communication and computation. On-chip whispering gallery mode resonators (WGMRs) can generate these states at ultra-low threshold power. In this paper, we demonstrate the simultaneous generation of three QFCs using a single on-chip Si₃N₄ WGMR across distinct modal families. We designed a micro-ring resonator with a radius of 240 μ m, capable of supporting four modal families within the 130 to 260 $THz$ frequency range for consistency regulation. Our results indicate that, by carefully designing the structure of Si₃ N₄ WGMRs, it is possible to generate quantum entangled frequency combs across distinct modal families simultaneously using monochromatic pump light. This is achieved by modulating the pump mode profiles with a spatial light modulator (SLM). Our approach offers a simple and low-cost method to achieve higher-density entanglement integration on-chip.