Aligned 2-photon lithography for photonic applications

We employ aligned two-photon lithography (A2PL®), to push high precision alignment tasks from the photonic packaging step towards the fabrication process in a one step process. Combined with Two-Photon Grayscale Lithography (2GL®), this approach enables direct fabrication of micro-optical elements onto devices, enhancing functionality with highest surface quality and shape fidelity at high throughput. We demonstrate automated 3D alignment using customer-ready detection algorithms, to fabricate micro-optical elements attached to various topographies and material platforms with exceptional accuracy below 100 nm. We showcase micro-optical elements aligned to fiber tips, photonic edge couplers, and photonic grating couplers to demonstrate the validity of A2PL for improved coupling losses and beam quality.