Metasurface integration into thin-film piezoelectric MEMS: realizations of a tunable waveplate and a tunable lens

We present two ultra-compact optical components realized by piezoelectric MEMS actuation of metasurfaces: (i) a dynamic waveplate allowing for full birefringence control, and (ii) a novel ultra-compact tunable lens. Integrating metasurfaces with thin-film Piezoelectric lead Zirconate Titanate (PZT) allows for large mechanical displacements (10-70μm) (i.e. capable of strong optical modulations) or fast actuation (⪆ 1kHz), both at low voltage (⪅ 30V) and ultra-low power (50-100nW at 23V). These components are enabling within a wide range of medical applications. A demonstration of our dynamic waveplate for enabling increased contrast under polarimetric mapping of ex-vivo tissue samples will be given.