A Study of a Temperature Effect on Characteristics of a Solidly Mounted Resonator Based on AlN, Al, Mo and Ti Thin Films

This article reports on experiments conducted to develop solidly mounted resonator (SMR) featuring a Bragg reflector composed of molybdenum and titanium films. The tested resonators operate at a frequency of 4.2 GHz, with a quality factor ranging from 860 to 1250. An investigation into the operating temperature's impact on the resonators electrical characteristics and equivalent electrical parameters was carried out, revealing linear alterations in static capacitance and dynamic inductance. The study found that the resonator's electrical properties are most affected by temperature changes in devices with a larger active SMR area, demonstrating a temperature coefficient of frequency (TCF) between -66…-78 ppm/°C.