In this paper, the automatic design optimization platform for FMM dummy pattern simulation based on AMOLED display screen has the advantages of short time, high precision, simple process and wide range of design combination. Specifically, the project simulation design time is reduced by half, the error rate in the simulation design process is reduced from 10% to 1%, the design combination range is increased by more than 10 times, and the FMM mask compensation accuracy is increased by 10%. Automated design optimization platform is helpful to improve product yield and save cost.
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Chen et al. (2024) studied this question.
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