Enhanced Fluid Characterization with a Cantilever Microbeaman System Excited by an Embedded Electroactive Source

When there is a variation in fluid concentration at the free end of a microcantilever, this phenomenon can be utilized in applications such as chemical analysis, biological testing, pharmaceutical screenings, and environmental monitoring. This paper introduces a novel sensor based on a silicon microcantilever, designed for fluid characterizing. Our approach employs an embedded electromechanical source that excites the microbeam cantilever array, achieving superior sensitivity compared to existing models. An Ultra High-Frequency Vibrometer is utilized to measure the shifts in peak frequencies and the displacement motion of the vibrating cantilever. Experimentally, we evaluate changes in viscosity and density as indicated by the frequency shift, with a particular focus on the desired harmonic mode.