Experimental study demonstrates single-shot dual-wavelength digital holography for calibrated test samples and chip manufacturing, indicating high-speed 3D industrial inspection.
Key Points
Dual-wavelength digital holography enables high-speed three-dimensional imaging for industrial inspection without requiring imaging lenses.
The optical system achieves 9.1 µm lateral resolution and a 50 µm unambiguous depth range, matching theoretical limits of phase reconstruction.
Off-axis digital holography with spatial frequency multiplexing accurately profiles calibrated test samples, supporting chip manufacturing inspection.