Irreversible Bonding of Polydimethylsiloxane‐Lithium Niobate using Oxygen Plasma Modification for Surface Acoustic Wave based Microfluidic Application: Theory and Experiment (Small Methods 5/2024)

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Inside Back Cover In article number 2301321, Liao, Liu, and co-workers reveal the bonding mechanisms of PDMS and LiNbO3, demonstrating an irreversible bonding method for PDMS-LiNbO3 heterostructures using oxygen plasma modification. Observing the gain and loss of PDMS and LiNbO3 surface molecules through an in-situ monitoring strategy for oxygen plasma. The formation of Si-O-Nb occurred between PDMS and LiNbO3. The PDMS-LiNbO3 microfluidic chip exhibited excellent performance, with the highest pressure exceeding 60 psi.