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April 28, 2024Plasma Science and Technology

Customized modulation on plasma uniformity by non-uniform magnetic field in capacitively coupled plasma

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S王Sen 森 WANG 王Q张Quanzhi 权治 ZHANG 张F马Fangfang 方方 MA 马

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王 et al. (2024) studied this question.

synapsesocial.com/papers/68e6d2e5b6db643587650c1fhttps://doi.org/10.1088/2058-6272/ad4469
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